4 ECTS credits
110 h study time

Offer 1 with catalog number 4016818FNR for all students in the 2nd semester at a (F) Master - specialised level.

Semester
2nd semester
Enrollment based on exam contract
Impossible
Grading method
Grading (scale from 0 to 20)
Can retake in second session
Yes
Taught in
English
Partnership Agreement
Under interuniversity agreement for degree program
Faculty
Faculty of Engineering
Department
Electronics and Informatics
Educational team
Roger VOUNCKX (course titular)
Activities and contact hours
18 contact hours Lecture
18 contact hours Seminar, Exercises or Practicals
Course Content

1. Overview of the important technological steps in the manufacturing of micro- and nano-devices.

2. Detailed treatment of such steps:

- Methods to obtain high purity materials.

- Mono crystalline growth

- Doping of crystals

- Manufacturing of substrates

- Electron beam systems and the manufacturing of masks and photolithography

- Dimensioning devices (geometrical factors)

- Oxidation

- Epitaxy techniques (CVD, MBE and MOCVD)

- Surface doping methods: diffusion and ion implantation

- Atomic layer deposition

- Physical vapor deposition: metallization, dielectrics, silicidation: evaporation, e-beam and sputtering (DC, AC, magneto-)

- Etching (wet and dry etching: wet chemical, physical (ion beam milling), dry chemical (plasma and reactive ion etching))

- Laser ablation

3. Physics and technology of some basic semiconductor electronic and optoelectronic devices:

- bipolar transistor

- self aligned gate MOSFET and CMOS

- optical detector

- solar cell

- LED (including OLED)

4. Practical sessions: Simulation of technological processes (TCAD)

Course material
Digital course material (Required) : Physics of Semiconductor Technologies and Devices, R. Vounckx, Pointcarré
Practical course material (Recommended) : Semiconductor Manufacturing Technology, Michail Quirk & Julian Serda, Prentice Hall, 9780195131864, 2001
Practical course material (Recommended) : An introduction to semiconductor microtechnology, D. V. Morgan and K. Board, 2nd, John Wiley, 9780471924784, 1990
Practical course material (Recommended) : Semiconductor Devices, Physics and Technology, S. M. Sze & M-K Lee, 3rd Edition, John Wiley, 9780130224040, 2013
Handbook (Recommended) : Fundamentals of Semiconductor Fabrication, Gary S. May and Simon S. Sze, John Wiley, 9780471232797, 2004
Handbook (Recommended) : Principles of solar cells, LEDs and diodes, Adrian Kitai, John Wiley, 9781444318333, 2011
Additional info

Study material

1. Written lecture notes are available on Poincaré and at the ETRO Department

2. Complementary study material:

i) VLSI Technology; Simon M. Sze; Ed.: McGraw Hill, 1983

ii) An introduction to semiconductor technology; D. V. Morgan and K. Board ; Ed. : John Wiley, 2nd edition, 1990

iii) Semiconductor Manufacturing Technology Michail Quirk & Julian Serda, Ed.: Prentice Hall 2001

iv) Basic Integrated Circuit Engineering, D.J. Hamilton & W.G. Howard, McGraw Hill, 1975

v) Fundamentals of Semiconductor Fabrication; Gary S. May and Simon S. Sze; Ed.: John Wiley, 2004

vi) Semiconductor Devices, Physics and Technology, S. M. Sze & M-K Lee Ed.: John Wiley, 3rd Ed. 2013

vii) Principles of solar cells, LEDs and diodes; Adrian Kitai; Ed.: John Wiley, 2011

Learning Outcomes

General competencies

Competences that are to be acquired:

To have a sound knowledge of the physics of technological processes that are being used to produce electronic and optoelectronic solid state devices. To acquire a basic knowledge of the physics of semiconductor optoelectronic devices.  To be able to bring together technological steps or processes into a technology to produce a device with certain properties.

Grading

The final grade is composed based on the following categories:
Other Exam determines 100% of the final mark.

Within the Other Exam category, the following assignments need to be completed:

  • exam with a relative weight of 1 which comprises 100% of the final mark.

    Note: 1. Oral exam about the lectures: 2/3 of the total score:
    An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.


    2.Written report during the lab sessions + oral questioning about the report: 1/3 of the total score:
    A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.

Additional info regarding evaluation

1. An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.

2. A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.

The examination on the theoretical part of the course accounts for 2/3 of the final mark; the report and the examination about the practical sessions account for 1/3.

Academic context

This offer is part of the following study plans:
European Master of Photonics: Standaard traject